The Intelligent Series Proven Technology for Your Applications RUVAC roots pumps are used in almost all areas of vacuum technology. They are a standard in combination with the established oil-sealed TRIVAC and SOGEVAC families. But they are also a standard as a complete dry combination with the DRYVAC and SCREWLINE family.
Leybold has taken the well-proven roots principle further and applied it in the RUVAC series to meet the highest requirements demanded by modern vacuum-based production processes:
The most frequent use of RUVAC roots pumps is to work as a booster stage for smaller forevacuum pumps to enable the compression of large volume flows of gases or vapors in the fine vacuum range.
Typical applications are heat treatment, furnaces, metallurgy or large area coating.
RUVAC roots pumps are standard equipment in the architectural glass coating industry. Combined with established oil sealed SOGEVAC pumps they realize the shortest pump down time at the loadlock chambers. Combined with the dry compressing DRYVAC and SCREWLINE pumps they guarantee a dry, reliable and trouble-free vacuum at the process chambers. RUVAC roots pumps are used in many applications to achieve the shortest possible cycle times. Wherever fast evacuations are important, for example in supporting load lock chambers or in high-speed food packaging. RUVAC roots pumps quickly reach a pressure of less than 10-3 mbar when evacuating lamps and insulating surfaces prior to the vapor deposition processes. RUVAC pumps are also used in monocrystal pulling equipment such as are used for the manufacture of silicon mono-crystal, the basic material for the manufacture of semiconductors and solar cells. We would be pleased to offer you our extensive product and applications support and know-how.
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